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完整的湿法工艺解决方案
完整的湿法工艺解决方案
单片清洗系统 < 0.15μm
AKRION
Goldfinger Mach2 & Mach2 HP
全自动湿处理系统 0.28 μm ~ 0.18 μm
AKRION
GAMA System
AKRION
V3 System
有机溶剂清洗系统
AKRION
GAMA System
PSM掩膜版清洗系统 < 157nm
AKRION
ClearIQ Reticle System (Patent Pending)
半自动湿处理系统 1.0 μm ~ 0.35 μm
BOLD
Semi-Automated Wet System
手动湿处理系统Manual Wet System > 0.5 μm
BOLD
Manual Wet System
MEMS 清洗
AKRION
GAMA Series MEMS/MST Solutions
AKRION
V3 MEMS/MST Solutions
AKRION
Goldfinger Single-wafer MEMS/MST Solutions
IMTEC
TM
AP&S
SwinStep
TM
Chemical Processing
单片处理机 (溅射式台式机及甩干机)
SPS
MCD Series
SPS
APT-Polos MCD200-456NPP
SPS
APT-Polos MCD200-456OEM
SPS
APT-Polos MCD200-NPP
SPS
APT-Polos MCD200-NPPOEM
SPS
ACD Series
SPS
APT-Polos ACD200-NPP
SPS
Polos ACD 200-NPPOEM
SPS
APT-SPIN150-NPP
LCD & OLED
专业清洗
Blackstone-NEY
Ultrasonic Cleaning Equipments
实验室/小批量试制用湿处理系统
SPS
Single Wafer Wet System
SPS
APT-Polos MCD200-456NPP
SPS
APT-Polos MCD200-456OEM
SPS
APT-Polos MCD200-NPP
SPS
APT-Polos MCD200-NPPOEM
SPS
APT-Polos ACD200-NPP
SPS
Polos ACD 200-NPPOEM
IMTEC
Table Wet System
IMTEC
ACCUMEG
IMTEC
ACCUSONIC
完整的化学试剂传输方案
IDS
Automated Wet System
AP&S
Chemical Delivery Solution
BOLD
Automated Wet System
翻新的FSI Mercury 系列
VTI
Refurbished FSI Mercury System
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